Accession Number : AD0760550

Title :   The Use of Scanning Auger Spectroscopy for Surface Analysis.

Descriptive Note : Masters thesis,

Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING

Personal Author(s) : Counts,Roger L.

Report Date : MAR 1973

Pagination or Media Count : 63

Abstract : A scanning Auger microscope was constructed at the Air Force Avionics Laboratory to permit surface analysis of solid state devices. The instrument was operated in a scanning electron microscope mode for initial tests and calibration. Electron gun operation was verified by measuring a beam current of 0.8 microampere. Electron beam diameter was determined to be approximately 20 microns by observing the resolution of the display. A cylindrical mirror analyzer was installed on the electron gun assembly and synchronous detection techniques were used to record Auger spectra. An apparent inability to record Auger peaks was localized to the analyzer. Wiring diagrams and operating instructions were formulated for the use of future operators of the apparatus. (Author)

Descriptors :   (*NONDESTRUCTIVE TESTING, *SURFACES), VACUUM APPARATUS, ELECTRON GUNS, SPECTRUM ANALYZERS, ELECTRONIC EQUIPMENT, WIRING DIAGRAMS, PERFORMANCE(ENGINEERING), THESES

Subject Categories : Electrical and Electronic Equipment
      Test Facilities, Equipment and Methods
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE