Accession Number : AD0762813

Title :   Sputtering of Multicomponent Materials by Ion Bombardment.

Descriptive Note : Final rept. Mar 69-28 Feb 73,

Corporate Author : MINNESOTA UNIV MINNEAPOLIS PHYSICAL ELECTRONICS LAB

Personal Author(s) : Wehner,Gottfried K.

Report Date : JUN 1973

Pagination or Media Count : 16

Abstract : Papers which resulted from the research are: 'Cone Formation on Metal Targets during Sputtering'; 'Alloy Sputtering Studies with in situ Auger Electron Spectroscopy'; 'Auger Electron Spectroscopy Studies of Sputter Deposition and Sputter Removal of Mo from Various Metal Surfaces'; 'Escape Length of Auger Electrons'; and 'Purple Plague and Au-Al Diffusion Studies with Auger Electron Spectroscopy'. (Modified author abstract)

Descriptors :   (*METAL COATINGS, *SPUTTERING), ION BOMBARDMENT, ELECTRON MICROSCOPY, MOLYBDENUM, METAL FILMS, TUNGSTEN, ALUMINUM, GOLD

Subject Categories : Coatings, Colorants and Finishes
      Fabrication Metallurgy

Distribution Statement : APPROVED FOR PUBLIC RELEASE