Accession Number : AD0763600

Title :   Sputtering (Industrial Process).

Descriptive Note : Bibliography Mar 55-Nov 72.

Corporate Author : DEFENSE DOCUMENTATION CENTER ALEXANDRIA VA

Report Date : JUL 1973

Pagination or Media Count : 217

Abstract : The bibliography contains citations of unclassified and unlimited reports on Sputtering as used in industrial processes dealing with techniques and applications of coatings and films. Discussed are metal films, integrated circuits, thin films, capacitors, resistors and transistors. (Author)

Descriptors :   (*SPUTTERING, *BIBLIOGRAPHIES), (*METAL FILMS, SPUTTERING), COATINGS, FILMS, DIELECTRIC FILMS, CAPACITORS, RESISTORS, TRANSISTORS, SEMICONDUCTOR DEVICES, SEMICONDUCTING FILMS, MICROELECTRONICS, INTEGRATED CIRCUITS

Subject Categories : Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE