Accession Number : AD0775588
Title : Electronic Surface Studies of Vacuum-Integrated-Circuit Components.
Descriptive Note : Final rept. on Phase 1,
Corporate Author : NAVAL RESEARCH LAB WASHINGTON D C
Personal Author(s) : Gray,Henry F. ; Haas,George A.
Report Date : 21 DEC 1973
Pagination or Media Count : 17
Abstract : Microelectronic vacuum-integrated-circuit components were studied to determine the emission capability of a newly developed electron emitter which is necessary for vacuum-integrated-circuit operation, to determine the surface-potential variations in the cathode and grid structures, and to determine the effects of migration, transport, and diffusion. (Modified author abstract)
Descriptors : *Integrated circuits, Vacuum, Thermionic emission, Cathodes, Auger electrons, Spectroscopy, Work functions, Microelectronics, Microcircuits, Surface properties, Electrons
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE