Accession Number : AD0779699
Title : New Microwave-Surface-Acoustic-Wave Transducer.
Descriptive Note : Final rept. 7 Nov 72-6 Sep 73,
Corporate Author : STANFORD RESEARCH INST MENLO PARK CALIF
Personal Author(s) : Lee,Robert E. ; Westerberg,Eugene R.
Report Date : MAR 1974
Pagination or Media Count : 81
Abstract : The report describes the development of a novel electron-beam image-projection exposure apparatus termed the 'slit-lens' system that has been used to fabricate high-resolution patterns for use as microwave-frequency surface-acoustic-wave transducers. Further research efforts include the development of ancillary techniques for making: (1) the intermediate electron-transmission masks required by the slit-lens system, and (2) the thin films necessary for production of metallic patterns on piezoelectric substrates. Various high-frequency surface-wave-transducer structures have been fabricated and electrically tested. The new 'hybrid-grating' transducer has been produced and its performance compared to that of conventional interdigital transducers (at microwave frequencies). A theoretical analysis of the hybrid and grating transducer has been carried out and the input impedance of these transducers has been compared with that of a conventional interdigital structure. Particular attention was paid to the effect of parasitic capacitance on the performance of the various transducers. (Modified author abstract)
Descriptors : *Transducers, *Microwave equipment, Surface waves, Acoustic waves, Fabrication
Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
Distribution Statement : APPROVED FOR PUBLIC RELEASE