Accession Number : AD0780186

Title :   Radiation Effects of MOS Gate Insulators.

Descriptive Note : Final rept. Jul-Dec 73,


Personal Author(s) : Fowkes,Frederick M. ; Kahlke,Walter E. ; Butler,Sidney R.

Report Date : JAN 1974

Pagination or Media Count : 45

Abstract : Impurity metal ions (sodium, aluminum, chromium, and gold) were diffused (and grown) into oxide films on silicon which were then exposed to 1,000,000 rads of ionizing radiation from a cobalt-60 source. The effects of radiation were observed by chemical analysis (to determine ion transport) and by conductance and capacitance measurements (to determine oxide charge and distribution of surface state density). (Modified author abstract)

Descriptors :   *Metal oxide semiconductors, *Radiation effects, Films, Gates(Circuits), Radiation hardening, Oxides, Ions, Impurities, Transport properties, Silicon dioxide, Silicon, Sodium, Aluminum, Chromium, Gold, Gamma rays

Subject Categories : Electrical and Electronic Equipment
      Radioactiv, Radioactive Wastes & Fission Prod

Distribution Statement : APPROVED FOR PUBLIC RELEASE