Accession Number : AD0819191
Title : TECHNIQUES FOR THE CONTROL OF INTEGRATED CIRCUIT QUALITY AND RELIABILITY. VOLUME I.
Descriptive Note : Final rept. 1 Jul 65-14 Apr 67,
Corporate Author : GENERAL ELECTRIC CO SYRACUSE NY SEMICONDUCTOR PRODUCTS DEPT
Personal Author(s) : Herr, Erwin A.
Report Date : JUN 1967
Pagination or Media Count : 332
Abstract : The use of the test pattern concept, TEG, for in-process quality control and device reliability of integrated circuits was investigated during the fabrication and reliability testing phases of integrated circuit production. The Test Element Group (TEG), which was diffused on the wafer at the same time as the elements of the integrated circuit, proved to be a very successful vehicle for achieving the goals of this program. The TEG was made up of a number of selected elements in the integrated circuit diffusion pattern, metallized and connected for test evaluation as discrete components. The relationship was investigated between in-process variables of semi-conductor fabrication, pre-stress characteristics of TEGS and integrated circuits and the post-stress characteristics of TEGS and integrated circuits. The basic purpose of this program has been met.
Descriptors : *QUALITY CONTROL), (*INTEGRATED CIRCUITS, RELIABILITY(ELECTRONICS), PROCESSING, MONITORS, TEST METHODS, ELECTRICAL PROPERTIES, THERMAL PROPERTIES, FAILURE(ELECTRONICS), TRANSISTOR AMPLIFIERS, MICROWAVE NETWORKS, ACCELERATED TESTING, STATISTICAL ANALYSIS.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE