Accession Number : AD0825231
Title : SINGLE-CRYSTAL DIELECTRIC FILMS,
Corporate Author : NAVAL AIR DEVELOPMENT CENTER WARMINSTER PA AERO-ELECTRONIC TECHNOLOGY DEPT
Personal Author(s) : Gibleski, W. M. ; Mackin, A. S.
Report Date : 21 DEC 1967
Pagination or Media Count : 28
Abstract : Techniques for vacuum depositing single-crystal dielectric films have been investigated and structural analysis of these films utilizing electron microscopy and electron diffraction has been performed. The dependence of film structure upon thermal history and the dependence of film structure upon background pressure during deposition have been investigated. (Author)
Descriptors : (*DIELECTRIC FILMS, MANUFACTURING), (*SINGLE CRYSTALS, MANUFACTURING), ELECTRON DIFFRACTION, ELECTRON MICROSCOPY, FILMS, CALCIUM FLUORIDES, CRYSTAL STRUCTURE, VAPOR PLATING, VACUUM APPARATUS.
Subject Categories : Miscellaneous Materials
Distribution Statement : APPROVED FOR PUBLIC RELEASE