Accession Number : AD0827212
Title : THIN FILM RC NETWORKS FOR SILICON INTEGRATED CIRCUITS.
Descriptive Note : Final rept. 1 Aug 66-1 Nov 67,
Corporate Author : MOTOROLA INC PHOENIX AZ SEMICONDUCTOR GROUP
Personal Author(s) : Terry, Louis E.
Report Date : FEB 1968
Pagination or Media Count : 110
Abstract : Resistor and capacitor elements were fabricated on oxidized silicon substates. Individual components, as well as resistor-transistor, capacitor-transistor, and resistor-capacitor-transistor integrated networks, were fabricated and tested with regard to their performance and reliability.
Descriptors : (*INTEGRATED CIRCUITS, FILMS), RESISTORS, CAPACITORS, CERMETS, SPUTTERING, GATES(CIRCUITS), VAPOR PLATING, DIELECTRIC FILMS, SILICON, COMPATIBILITY, TRANSISTORS, RADIOFREQUENCY AMPLIFIERS, NETWORKS, RELIABILITY(ELECTRONICS), MANUFACTURING.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE