Accession Number : AD0827212

Title :   THIN FILM RC NETWORKS FOR SILICON INTEGRATED CIRCUITS.

Descriptive Note : Final rept. 1 Aug 66-1 Nov 67,

Corporate Author : MOTOROLA INC PHOENIX AZ SEMICONDUCTOR GROUP

Personal Author(s) : Terry, Louis E.

Report Date : FEB 1968

Pagination or Media Count : 110

Abstract : Resistor and capacitor elements were fabricated on oxidized silicon substates. Individual components, as well as resistor-transistor, capacitor-transistor, and resistor-capacitor-transistor integrated networks, were fabricated and tested with regard to their performance and reliability.

Descriptors :   (*INTEGRATED CIRCUITS, FILMS), RESISTORS, CAPACITORS, CERMETS, SPUTTERING, GATES(CIRCUITS), VAPOR PLATING, DIELECTRIC FILMS, SILICON, COMPATIBILITY, TRANSISTORS, RADIOFREQUENCY AMPLIFIERS, NETWORKS, RELIABILITY(ELECTRONICS), MANUFACTURING.

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE