Accession Number : AD0833788

Title :   STUDY OF THE HIGH YIELD SPUTTERING OF REFRACTORY METALS.

Descriptive Note : Phase rept.,

Corporate Author : NAVAL AIR DEVELOPMENT CENTER WARMINSTER PA AERO-ELECTRONIC TECHNOLOGY DEPT

Personal Author(s) : Vujacic, P.

Report Date : 13 MAY 1968

Pagination or Media Count : 42

Abstract : Some fundamental aspects of the problem of increase of sputtering yields of hafnium, tantalum, tungsten, and rhenium are discussed and the different methods to improve these yields are proposed. (Author)

Descriptors :   (*REFRACTORY METALS, SPUTTERING), PRODUCTION, CRYSTAL LATTICES, OPTIMIZATION, HAFNIUM, TANTALUM, TUNGSTEN, RHENIUM, TEST METHODS, DEPOSITION, PURIFICATION, ELECTRONS, HYDROGEN, PENETRATION, GASES, ABSORPTION, MOMENTUM, FEASIBILITY STUDIES, ION BOMBARDMENT, EXCITATION, TARGETS, EQUATIONS, HARDNESS, THICKNESS.

Subject Categories : Metallurgy and Metallography

Distribution Statement : APPROVED FOR PUBLIC RELEASE