Accession Number : AD0845594

Title :   Applications of Thin Films in Electronics,

Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH

Personal Author(s) : Boros-Gyevi, J. ; Motal, G.

Report Date : 04 APR 1968

Pagination or Media Count : 19

Abstract : The authors review the application of thin films produced by vacuum vaporization, cathode sputtering, diffusion, and epitaxial growing in the fields of passive and active electric components and microminiaturization. Some of the most important characteristics of thin films are summarized. (Author)

Descriptors :   (*METAL FILMS, MANUFACTURING), EPITAXIAL GROWTH, ELECTRICAL PROPERTIES, SUBMINIATURE ELECTRICAL EQUIPMENT, RESISTORS, CERMETS, THERMAL PROPERTIES, CAPACITORS, VACUUM APPARATUS, VAPOR PLATING, HUNGARY, TANTALUM COMPOUNDS, MICROELECTRONICS.

Subject Categories : Ceramics, Refractories and Glass
      Metallurgy and Metallography

Distribution Statement : APPROVED FOR PUBLIC RELEASE