Accession Number : AD0845594
Title : Applications of Thin Films in Electronics,
Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH
Personal Author(s) : Boros-Gyevi, J. ; Motal, G.
Report Date : 04 APR 1968
Pagination or Media Count : 19
Abstract : The authors review the application of thin films produced by vacuum vaporization, cathode sputtering, diffusion, and epitaxial growing in the fields of passive and active electric components and microminiaturization. Some of the most important characteristics of thin films are summarized. (Author)
Descriptors : (*METAL FILMS, MANUFACTURING), EPITAXIAL GROWTH, ELECTRICAL PROPERTIES, SUBMINIATURE ELECTRICAL EQUIPMENT, RESISTORS, CERMETS, THERMAL PROPERTIES, CAPACITORS, VACUUM APPARATUS, VAPOR PLATING, HUNGARY, TANTALUM COMPOUNDS, MICROELECTRONICS.
Subject Categories : Ceramics, Refractories and Glass
Metallurgy and Metallography
Distribution Statement : APPROVED FOR PUBLIC RELEASE