Accession Number : AD0847073
Title : Application of Thin Films in Electronics,
Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH
Personal Author(s) : Boros-Gyevi, J. ; Motal, G.
Report Date : 25 APR 1968
Pagination or Media Count : 26
Abstract : The article reviews the application of thin films (produced by vacuum evaporation, cathode sputtering, diffusion and epitaxial growing) in the field of passive and active electric components and in microminiaturization. Some of the characteristics of thin films are summarized. (Author)
Descriptors : (*MINIATURE ELECTRONIC EQUIPMENT, METAL FILMS), SEMICONDUCTOR DEVICES, SINGLE CRYSTALS, EPITAXIAL GROWTH, SURFACE PROPERTIES, HUNGARY.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE