Accession Number : AD0855286

Title :   Manufacturing Technique for Low-Temperature Silicon Deposition.

Descriptive Note : Final rept. 1 Feb 68-31 Jan 69,

Corporate Author : RCA LABS PRINCETON NJ

Personal Author(s) : Richman, David ; Arlett, Robert H. ; Dismukes, John P.

Report Date : JUN 1969

Pagination or Media Count : 87

Descriptors :   (*SEMICONDUCTING FILMS, MANUFACTURING), (*SILICON, EPITAXIAL GROWTH), SINGLE CRYSTALS, PYROLYSIS, SILANES, ETCHING, ELECTRON MICROSCOPY, CRYSTAL DEFECTS, HYDROCHLORIC ACID, HELIUM, SUBSTRATES, DOPING.

Subject Categories : Mfg & Industrial Eng & Control of Product Sys
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE