Accession Number : AD0860153

Title :   A Microcircuit Laboratory for the Underwater Electrical Engineering Department,

Corporate Author : NAVAL ORDNANCE LAB WHITE OAK MD

Personal Author(s) : Wood, Clarence R., Jr

Report Date : 26 JUN 1969

Pagination or Media Count : 18

Abstract : A clean room microelectronic laboratory has been completed in the Code 520, Underwater Electrical Engineering Department. This report describes the laboratory, the equipment and the capability. The laboratory is relatively small, occupying only 400 square feet of floor space, but is complete in that it is capable of performing most of the required techniques for fabricating microelectronic circuits with the major exception of diffusion. (Author)

Descriptors :   (*MICROELECTRONICS, MANUFACTURING), (*ELECTRONICS LABORATORIES, NAVAL RESEARCH LABORATORIES), (*CLEAN ROOMS, INDUSTRIAL EQUIPMENT), (*SEMICONDUCTING FILMS, DEPOSITION).

Subject Categories : Mfg & Industrial Eng & Control of Product Sys
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE