Accession Number : AD0863952
Title : Thin-Film Channel-Multiplier Arrays.
Descriptive Note : Final development rept. 18 Mar 68-17 Mar 69,
Corporate Author : STANFORD RESEARCH INST MENLO PARK CA
Personal Author(s) : Spindt, C. A.
Report Date : DEC 1969
Pagination or Media Count : 42
Abstract : Developmental work on a novel method for forming arrays of submicron-diameter electron-multiplier channels in thin-wafer form is described. The method is based on the development and adaptation of appropriate thin-film techniques. The four major aspects of the method are: (1) the formation of perimeter-supported base films, (2) the formation of arrays of submicron-size holes in such base films, (3) the exploration of resistive dynode film materials having the requisite resistivity and electrical breakdown strength, and (4) vacuum deposition of such dynode material onto holey base films, thereby forming microchannels by propagation of the holes. (Author)
Descriptors : (*ELECTRON MULTIPLIERS, FILMS), VACUUM APPARATUS, VAPOR PLATING, FEASIBILITY STUDIES, ETCHING, MOLYBDENUM, SANDWICH CONSTRUCTION.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE