Accession Number : AD0866169
Title : A Flexible Ultra-High Vacuum R and D System.
Descriptive Note : Phase rept.,
Corporate Author : NAVAL AIR DEVELOPMENT CENTER WARMINSTER PA AERO-ELECTRONIC TECHNOLOGY DEPT
Personal Author(s) : Gentner, K.
Report Date : 04 FEB 1970
Pagination or Media Count : 23
Abstract : An ultra-high vacuum system for 10 to the minus 11 and 12 power torr operational range has been designed and constructed. The high degree of flexibility inherent in the system design makes maximum use of the pump system and operational space for this task and for future projects. (Author)
Descriptors : (*METAL FILMS, DEPOSITION), (*VACUUM APPARATUS, DESIGN), (*SPUTTERING, VACUUM APPARATUS), MATERIALS, IMPURITIES, RARE GASES, MANUFACTURING, ELECTROOPTICS, VACUUM PUMPS, MICROELECTRONICS.
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE