Accession Number : AD0871316

Title :   Silicon Nitride Manufacturing Process.

Descriptive Note : Final technical rept. 1 Jul 68-30 Aug 69,

Corporate Author : GENERAL ELECTRIC CO SYRACUSE NY SEMICONDUCTOR PRODUCTS DEPT

Personal Author(s) : Hartman, David K. ; Herr, Erwin A. ; Affleck, J. H. ; Bair, B. L. ; Clark, R. L.

Report Date : JUN 1970

Pagination or Media Count : 387

Descriptors :   *NITRIDES), (*DIELECTRIC FILMS, (*INTEGRATED CIRCUITS, DIELECTRIC FILMS), SILICON COMPOUNDS, MANUFACTURING, DEPOSITION, SILICON DIOXIDE, BARRIER COATINGS, MASKING, SILICON.

Subject Categories : Electrical and Electronic Equipment
      Miscellaneous Materials
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE