Accession Number : AD0879620

Title :   Silicon-on-Sapphire Transistor Development.

Descriptive Note : Final rept. 10 Nov 69-9 Nov 70,

Corporate Author : RCA LABS PRINCETON NJ

Personal Author(s) : Dumin, David J. ; Robinson, Paul H. ; Ronen, Ram S.

Report Date : JAN 1971

Pagination or Media Count : 78

Abstract : The report discusses further advances made in the silicon-on-insulator system resulting from the use of improved materials and from the use of improved thin-film processing techniques. The work was concentrated on achieving higher speed transistors by: Improving the starting silicon; Developing and optimizing new processing techniques needed for high-speed transitor fabrication; and Making both low- and high-frequency measurements on finished devices to determine their high-frequency capabilities. (Author)

Descriptors :   (*TRANSISTORS, MANUFACTURING), SILICON, SAPPHIRE, SUBSTRATES, SPINEL, ULTRAHIGH FREQUENCY.

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE