Accession Number : AD0879620
Title : Silicon-on-Sapphire Transistor Development.
Descriptive Note : Final rept. 10 Nov 69-9 Nov 70,
Corporate Author : RCA LABS PRINCETON NJ
Personal Author(s) : Dumin, David J. ; Robinson, Paul H. ; Ronen, Ram S.
Report Date : JAN 1971
Pagination or Media Count : 78
Abstract : The report discusses further advances made in the silicon-on-insulator system resulting from the use of improved materials and from the use of improved thin-film processing techniques. The work was concentrated on achieving higher speed transistors by: Improving the starting silicon; Developing and optimizing new processing techniques needed for high-speed transitor fabrication; and Making both low- and high-frequency measurements on finished devices to determine their high-frequency capabilities. (Author)
Descriptors : (*TRANSISTORS, MANUFACTURING), SILICON, SAPPHIRE, SUBSTRATES, SPINEL, ULTRAHIGH FREQUENCY.
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE