Accession Number : AD0893266

Title :   Development of Silicon Monolithic Surface Wave Arrays.

Descriptive Note : Final rept. 1 Jul-31 Dec 71,

Corporate Author : SOUTHERN METHODIST UNIV DALLAS TX ELECTRONIC SCIENCES CENTER

Personal Author(s) : Mize, Jack P.

Report Date : MAR 1972

Pagination or Media Count : 49

Abstract : The objective of this research is to fabricate silicon device structures capable of generating acoustic surface waves. Realization of this objective would result in silicon programmable surface-wave arrays which would be fully compatible with MOS/LSI technology. The performance and cost effectiveness of MOS/LSI applied to these electronic functions could have a major impact on radar and communication system technology. Silicon is a piezoresistive material, and this property has previously been utilized in MOSFET surface-wave detection. Since silicon is not piezoelectric, this investigation has employed stress generation in pulsed, reverse-biased p-n junctions and voltage activated MOS capacitor structures for the purpose of surface-wave generation. The surface disturbances produced by these active structures are intended to excite acoustic waves along the silicon surface. Extensive experiments with p-n junctions and MOS structures reported herein unfortunately have failed to produce surface-wave excitation. A discussion of the negative result is given and suggestions for alternate methods of implementing programmable monolithic surface-wave arrays are proposed. (Author)

Descriptors :   *ACOUSTICS), (*PIEZOELECTRIC TRANSDUCERS, (*RAYLEIGH WAVES, GENERATORS), INTEGRATED CIRCUITS, FIELD EFFECT TRANSISTORS, ANALOG SYSTEMS, RADAR EQUIPMENT, COMMUNICATION EQUIPMENT, DELAY LINES, ELECTRIC FIELDS, QUARTZ, LITHIUM COMPOUNDS, NIOBATES, MATCHED FILTERS, DECODING, WAVEFORM GENERATORS, STRESSES, CAPACITORS, SUBSTRATES, COST EFFECTIVENESS, EXCITATION, SILICON, OXIDATION.

Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
      Acoustics
      Radiofrequency Wave Propagation

Distribution Statement : APPROVED FOR PUBLIC RELEASE