Accession Number : AD0905638

Title :   Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

Descriptive Note : Quarterly rept. no. 5, 1 Apr-1 Jul 72,

Corporate Author : TEXAS INSTRUMENTS INC DALLAS

Personal Author(s) : Pankratz, John M. ; Ch'en, Daniel R. ; Varnell, Gilbert L.

Report Date : 01 JUL 1972

Pagination or Media Count : 28

Abstract : The purpose of this contract is to establish and demonstrate, under production conditions, the use of electron-beam photolithography in the fabrication of integrable microwave transistors. (Author)

Descriptors :   (*TRANSISTORS, MANUFACTURING), (*ELECTRON BEAMS, PHOTOENGRAVING), MICROWAVE FREQUENCY, SPECIFICATIONS, AUTOMATIC, INTERFACES, STYRENE PLASTICS, ELECTRON GUNS, ELECTROSTATICS, ALIGNMENT, LITHOGRAPHY, LASERS, INTERFEROMETERS, COMPUTERS.

Subject Categories : Electrical and Electronic Equipment
      Plastics
      Particle Accelerators

Distribution Statement : APPROVED FOR PUBLIC RELEASE