Accession Number : AD0907880

Title :   Production Engineering Measure for an Electron-Beam Machine and Microwave Transistors.

Descriptive Note : Quarterly rept. no. 6, 1 Jul-1 Oct 72,

Corporate Author : TEXAS INSTRUMENTS INC DALLAS

Personal Author(s) : Pankratz, John M. ; Ch'en, Daniel R. ; Varnell, Gilbert L.

Report Date : OCT 1972

Pagination or Media Count : 20

Abstract : During the sixth quarter of work significant progress was made in upgrading the electron beam machine, and the machine was moved to a new clean room. A LaB6 electron gun, an electrostatic beam blanking unit, and a new computer/machine interface (bean control waveform generator) were installed on the instrument and are functioning to specifications. Major modifications were made to the pattern generation and auto-align software to take advantage of the new capabilities of the upgraded system. These software subsystems and the stage movement software are completely functional. No microwave transistor lots were initiated during the sixth quarter because of the instrument upgrading effort. E-beam delineation was limited to pattern generation, auto-align, and resist process testing. (Author)

Descriptors :   (*ELECTRON BEAMS, MACHINES), (*PHOTOENGRAVING, ELECTRON BEAMS), TRANSISTOR AMPLIFIERS, INTEGRATED CIRCUITS, ELECTRON GUNS, ALIGNMENT, WAVEFORM GENERATORS, AUTOMATIC, ELECTRON OPTICS, LANTHANUM COMPOUNDS, BORON ALLOYS, MICROWAVE AMPLIFIERS, MANUFACTURING.

Subject Categories : Electrical and Electronic Equipment
      Machinery and Tools

Distribution Statement : APPROVED FOR PUBLIC RELEASE