Accession Number : AD0914831

Title :   Production Engineering Measure for an Electron Beam Machine and Microwave Transistors.

Descriptive Note : Final rept.,

Corporate Author : TEXAS INSTRUMENTS INC DALLAS CENTRAL RESEARCH LABS

Personal Author(s) : Pankratz, John M. ; Creagh, Linda T. ; Varnell, Gilbert L.

Report Date : SEP 1973

Pagination or Media Count : 152

Abstract : This report discusses the electron beam machine, a high performance ML-220 transistor, processing techniques, and yields. Data and analysis for transistor performance are provided as are machine and device specifications, pilot line requirements, and a disscussion of costs. In general the electron beam techniques developed during the contract are applicable to a variety of solid-state devices which require higher frequency performance and higher packing density. Some applications of electron beam techniques are magnetic bubble memories, charge-coupled devices, surface wave devices and field-effect transistors.

Descriptors :   (*ELECTRON BEAMS, PRODUCTION ENGINEERING), (*TRANSISTORS, MICROWAVE FREQUENCY), FIELD EFFECT TRANSISTORS, MANUFACTURING, MAGNETIC DEVICES, FLOW CHARTING, BUBBLES, TOOLING, MEMORY DEVICES, ELECTRON OPTICS, SURFACE WAVES, SPECIFICATIONS, SILICON, ALIGNMENT.

Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
      Mfg & Industrial Eng & Control of Product Sys
      Particle Accelerators

Distribution Statement : APPROVED FOR PUBLIC RELEASE