Accession Number : AD0919567
Title : Thin Film Optical Waveguide Technology.
Descriptive Note : Final rept. Apr 72-Oct 73,
Corporate Author : PERKIN-ELMER CORP NORWALK CT
Personal Author(s) : Zernike, Frits
Report Date : MAR 1974
Pagination or Media Count : 56
Abstract : Passive thin film waveguide components investigated under this contract were: 1) coupled waveguides, 2) waveguide lenses, 3) taper couplers, 4) waveguides with more or less rectangular cross sections. The coupling between waveguides was investigated in detail, both theoretically and experimentally. Methods for making 3-dB couplers and switches are described. Different experimental methods of making waveguide lenses were attempted; however, only two were found to be useful: one produces a lens with rectangular contours but thicker in the center and the other produces a round domed lens. Different tapers were investigated. It was found that a well-defined narrow output (input) angle can be obtained by using a very slow taper. Waveguides with trapezoidal cross sections were produced by sputter-etching of slab type waveguides using photoresist masks. The necessary patterns in these masks were made by exposing the photoresist pattern with a focused beam from a He-Cd laser operating at 4416A. (Author)
Descriptors : *THIN FILMS), (*WAVEGUIDES, INTEGRATED SYSTEMS, OPTICS, LASERS, LENSES, SPUTTERING, MASKING, DEPOSITION, PASSIVE SYSTEMS, ETCHING, MIXTURES, COUPLING CIRCUITS, THREE DIMENSIONAL, REFRACTIVE INDEX, SILICON DIOXIDE, SUBSTRATES, THICKNESS, PROPAGATION, MANGANESE, GLASS, HELIUM, CADMIUM, GOLD, BARIUM OXIDES.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE