Accession Number : ADA115146

Title :   Workshop on the Interaction of Laser Radiation with Surfaces for Application to Microelectronics, 4-5 May 81.

Descriptive Note : Final rept. 1 May-31 Oct 81,

Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s) : Osgood,Richard

PDF Url : ADA115146

Report Date : 31 Oct 1981

Pagination or Media Count : 29

Abstract : A workshop was held which was devoted to the physics and chemistry of new optical processing and analysis techniques on surfaces for materials and structures of interest in microelectronics. It contained tutorial papers on topics of general interest to this technical area and reviewed progress in ongoing research. In addition, selected short talks describing recent results were presented. The workshop included talks from various groups throughout the United States and Europe.

Descriptors :   *Laser beams, *Radiation, *Leaching, *Microelectronics, Physics, Surface chemistry, Optical processing, Workshops, Laser materials, Structures, Literature surveys, Europe, United States

Subject Categories : Lasers and Masers

Distribution Statement : APPROVED FOR PUBLIC RELEASE