Accession Number : ADA115146
Title : Workshop on the Interaction of Laser Radiation with Surfaces for Application to Microelectronics, 4-5 May 81.
Descriptive Note : Final rept. 1 May-31 Oct 81,
Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
Personal Author(s) : Osgood,Richard
PDF Url : ADA115146
Report Date : 31 Oct 1981
Pagination or Media Count : 29
Abstract : A workshop was held which was devoted to the physics and chemistry of new optical processing and analysis techniques on surfaces for materials and structures of interest in microelectronics. It contained tutorial papers on topics of general interest to this technical area and reviewed progress in ongoing research. In addition, selected short talks describing recent results were presented. The workshop included talks from various groups throughout the United States and Europe.
Descriptors : *Laser beams, *Radiation, *Leaching, *Microelectronics, Physics, Surface chemistry, Optical processing, Workshops, Laser materials, Structures, Literature surveys, Europe, United States
Subject Categories : Lasers and Masers
Distribution Statement : APPROVED FOR PUBLIC RELEASE