Accession Number : ADA116800

Title :   Ultraviolet Enhanced Deposition from Pentacarbonyl-Iron on Gallium Arsenide, Quartz, and Sapphire.

Descriptive Note : Summary rept. Jun-Aug 81,

Corporate Author : NAVAL WEAPONS CENTER CHINA LAKE CA

Personal Author(s) : Bottka,N ; Walsh,P

PDF Url : ADA116800

Report Date : Oct 1981

Pagination or Media Count : 49

Abstract : This report assesses the potential utilization of organo-metals in the thin-film deposition of metals, semiconductors, and insulators onto various substrates. The emphasis is on the particular advantages of the ultraviolet photolysis of organometals using incoherent light for low temperature, wide-area deposition of thin films. Experimental results on the photolysis and pyrolysis of pentacarbonyl-iron on gallium arsenide, quartz, and sapphire are reported. (Author)

Descriptors :   *Organometallic compounds, *Thin films, *Deposition, *Semiconductors, Carbonyl compounds, Iron, Gallium arsenides, Quartz, Sapphire, Photolysis, Pyrolysis, Ultraviolet radiation, Low temperature

Subject Categories : Fabrication Metallurgy
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE