Accession Number : ADA117000
Title : Superconductive Niobium Oxide Tunnel Device Program.
Descriptive Note : Final rept. 1 Sep 80-15 Jan 81,
Corporate Author : TEXAS INSTRUMENTS INC DALLAS EQUIPMENT GROUP
Personal Author(s) : Buckner,Spencer A
PDF Url : ADA117000
Report Date : 15 Apr 1982
Pagination or Media Count : 30
Abstract : The purpose of this program was to develop the technology for the fabrication of small-area Josephson tunnel junctions with niobium electrodes for use as microwave detectors and mixers. Niobium-niobium oxide-lead junctions were used to establish processes for sputter cleaning and sputter oxidizing the niobium base electrode. When these processes were established, niobium-niobium oxide-niobium junctions were made by sputtering the base electrode, sputter cleaning and sputter oxidizing the base electrode in a sputter deposition system with backsputter capability, and evaporating the upper electrode in an electron-beam evaporation system. Experiments were also done to make junctions with aluminum-oxide barriers. The report is divided into seven parts: (1) vacuum systems, (2) masks for photolithography, (3) processing techniques, (4) niobium-niobium oxide-lead junctions, (5) niobium-niobium oxide-niobium junctions, (6) niobium-aluminum oxide-aluminum-niobium junctions, (7) summary and conclusions.
Descriptors : *Superconductors, *Niobium, *Oxides, *Electrodes, Microwaves, Detectors, Photolithography, Sputtering, Vacuum apparatus, Evaporation, Fabrication, Electron beams, Tunneling(Electronics), Deposition
Subject Categories : Electricity and Magnetism
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE