Accession Number : ADA117456
Title : Mercury Cadmium Telluride Sputtered Target Research.
Descriptive Note : Final technical rept.,
Corporate Author : NEW JERSEY INST OF TECH NEWARK DEPT OF ELECTRICAL ENGINEERING
Personal Author(s) : Cornely,Roy H ; Suchow,Lawrence ; Bourne,Robert
PDF Url : ADA117456
Report Date : 29 Jun 1982
Pagination or Media Count : 48
Abstract : Techniques for fabricating large-area targets by pressing either a physical mixture of HgTe and CdTe powder particles (7 micron average size) or a similar-size powder ground from (Hg,Cd)Te polycrystalline ingots were developed. Sixty SEM microphotographs of regions of r.f. triode-sputtered targets, sputtered to different erosion depths, revealed topographical changes and dynamic erosion processes, e.g. cone formation and deteriotion. The sputter-protect theory for cone formation due to larger, slow-sputtering particles (10-50 microns) was demonstrated. Distinctly different cone angle distributions for HgTe and CdTe particles were measured; x-ray powder patterns revealed fusion of smaller HgTe and CdTe particles.
Descriptors : *Processing, *Sputtering, *Mercury, *Cadmium tellurides, *Electron microscopy, Powder metals, Bromine, Etching, Spectroscopy, Low temperature, Scanning, Methyl radicals, Alcohols
Subject Categories : Fabrication Metallurgy
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE