Accession Number : ADA119494

Title :   Calibration of a Mass Spectrometer for Analysis of Ultramicro Gas Samples Using a Dynamic Method of Analysis.

Descriptive Note : Technical rept.,

Corporate Author : AEROSPACE CORP EL SEGUNDO CA MATERIALS SCIENCES LAB

Personal Author(s) : Graven,Wendell M ; Gilmartin,Donald E

PDF Url : ADA119494

Report Date : 16 Aug 1982

Pagination or Media Count : 56

Abstract : A special-purpose mass spectrometer was allocated to analyze very small amounts of residual gases in electronic devices, principally traveling wave tubes. Because of device-related constraints that made it necessary to transport ultramicro amounts of gas to the analyzer, a dynamic method of analysis was adopted. Using calibrated leak sources, reliable transport and reproducible analyses of ultramicro amounts of gases were demonstrated with seven gases over a four-decade range. For inert gases, the reproducible analytical range extended below 10 to the -11th power atm/cu cm. Extensive calibrations were carried out with eight gases by using both the residual gas analyzer and the ionization gauge as detection instruments. These data, as well as the results of residual gas analyses conducted with production-quality traveling wave tubes, have validated the dynamic method of analysis. (Author)

Descriptors :   *Mass spectrometers, *Mass spectroscopy, *Calibration, Gas ionization, Quantitative analysis, Gas analysis, Traveling wave tubes, Electronic equipment, Ionization gages, Reliability, Rare gases

Subject Categories : Atomic and Molecular Physics and Spectroscopy

Distribution Statement : APPROVED FOR PUBLIC RELEASE