Accession Number : ADA119751

Title :   Solid State Standard Addition Method in Secondary Ion Mass Spectrometry for Improvement of Detection Limits.

Descriptive Note : Interim technical rept.,

Corporate Author : CORNELL UNIV ITHACA NY DEPT OF CHEMISTRY

Personal Author(s) : Chu,Paul K ; Morrison,George H

PDF Url : ADA119751

Report Date : 22 Sep 1982

Pagination or Media Count : 18

Abstract : The technique of solid state standard addition is inadequate for the determination of low dopant concentrations present in real semiconductor samples. An extension of the solid state standard addition method using computer controlled signal integration is shown to lower the detection limit of boron in silicon by an order of magnitude. The precision and accuracy of this method were found to be 25% and 12%, respectively. (Author)

Descriptors :   *Mass spectroscopy, *Ions, *Secondary, *Detection, Methodology, Limitations, Computers, Control systems, Signal processing, Solid state chemistry, Addition reactions, Doping, Semiconductors, Ion implantation

Subject Categories : Atomic and Molecular Physics and Spectroscopy

Distribution Statement : APPROVED FOR PUBLIC RELEASE