Accession Number : ADA130113

Title :   The Quartz Envelope Heater: A New Heating Technique for MOCVD Systems,

Corporate Author : AEROSPACE CORP EL SEGUNDO CA ELECTRONICS RESEARCH LAB

Personal Author(s) : Boldish,S I ; Ciofalo,J S ; Barker,D H

PDF Url : ADA130113

Report Date : 16 May 1983

Pagination or Media Count : 15

Abstract : The quartz envelope heater, a new heating apparatus designed specifically for metal organic chemical vapor deposition, is described. Discussed as well are its advantages over traditional heating techniques, such as RF induction heating and quartz lamp heating. The apparatus also has more general application to any chemical vapor deposition system which requires a single temperature zone to a maximum of 800 C and which does not contain reactants that chemically attack quartz glass.

Descriptors :   *Heaters, *Organometallic compounds, *Vapor deposition, *Epitaxial growth, Substrates, Heating, Layers, Gallium arsenides, Aluminides, Quartz, Envelope(Space), Systems engineering, Resistance, Silicon carbides

Subject Categories : Air Condition, Heating, Lighting & Ventilating
      Crystallography
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE