Accession Number : ADA131864

Title :   Radiolysis of Resist Polymers. 1. Poly(methyl-alpha-haloacrylates) and Copolymers with Methylmethacrylate.

Descriptive Note : Technical rept.,

Corporate Author : MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Personal Author(s) : Babu,G N ; Narula,A ; Hsu,S L ; Chien,James C W

PDF Url : ADA131864

Report Date : Aug 1983

Pagination or Media Count : 45

Abstract : Methyl alpha-chloroacrylate (MCA) and methyl alpha-bromoacrylate (MBA) were copolymerized with methyl methacrylate (MMA) over a broad range of composition. The copolymers were exposed to gamma-radiation to determine chain scission susceptibility. The mechanisms of degradation of copolymers towards radiation was suggested from product analysis. The radiolysis of copolymers of MMA with MCA and MBA are dominated by the alpha-halogenated monomers. (Author)

Descriptors :   *Copolymers, *Radiolysis, *Methacrylates, *Copolymerization, Crosslinking(Chemistry), Methyl radicals, Molecular structure, Chains, Bromine, Gamma rays, Halogens, Monomers

Subject Categories : Radiation and Nuclear Chemistry
      Plastics

Distribution Statement : APPROVED FOR PUBLIC RELEASE