Accession Number : ADA132032

Title :   Radiolysis of Resist Polymers. III. Copolymers of Methyl-Alpha-Chloroacrylate and Trihaloethylmethacrylates.

Descriptive Note : Technical rept.,

Corporate Author : MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Personal Author(s) : Babu,G N ; Lu,P H ; Hsu,S L ; Chien,J C W

PDF Url : ADA132032

Report Date : Aug 1983

Pagination or Media Count : 45

Abstract : Homopolymers of 2,2,2-trifluoroethyl methacrylate (TFEMA) and 2,2,2-trichloroethyl methacrylate (TCEMA) and copolymers with methyl alpha-chloroacrylate (MCA) of a range of composition were synthesized. Radiolysis of copolymers are initiated by dissociative electron capture by the halogen atom. GC-MS analysis of volatile products show that the poly(TFEMA) tend to depolymerize but not poly(TCEMA). Some of the polymers merit further investigations for E-beam or X-ray lithographic applications. (Author)

Descriptors :   *Copolymers, *Acrylates, *Radiolysis, Chlorine compounds, Methacrylates, Fluorine compounds, Ethyl radicals, Chemical dissociation, Electron capture, Copolymerization, Reactivities, Ratios, Crosslinking(Chemistry), Recombination reactions, Chemical composition, Gas chromatography, Mass spectrometry, Volatility, Depolymerization, Radiation resistance

Subject Categories : Radiation and Nuclear Chemistry
      Polymer Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE