Accession Number : ADA132044

Title :   Radiolysis of Resist Polymers. IV. Poly(p-substituted-alpha-methylstyrenes).

Descriptive Note : Technical rept.,

Corporate Author : MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Personal Author(s) : Babu,G N ; Lu,P H ; Hsu,S L ; Chien,J C W

PDF Url : ADA132044

Report Date : Aug 1983

Pagination or Media Count : 32

Abstract : The effect of saver-substituent on the radiation chemistry of poly(alpha-methylstyrene) (PMS) was compared for the fluoro (PFMS), chloro (PCMS), bromo (PBMS) isopropyl (PIPMS) and methoxy (PMEOM) derivatives. The radiolysis yields, ESR spectra and GC-MS analysis of products were obtained. PMEOMS and PIPMS gel readily by gamma-radiation. They may be useful as negative resist materials. (Author)

Descriptors :   *Polymers, *Methyl radicals, *Styrenes, *Radiolysis, Radiochemistry, Radiation dosage, Ionizing radiation, Separation, Crosslinking(Chemistry), Depolymerization, Chemical derivatives, Fluoropolymers, Chlorine, Bromine, Propyl radicals, Methyl radicals, Electron spin resonance, Spectra, Gas chromatography, Mass spectrometry, Radiation resistance

Subject Categories : Radiation and Nuclear Chemistry
      Polymer Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE