Accession Number : ADA132095

Title :   Radiolysis of Resist Polymers. 2. Poly(haloalkylmethacrylates) and Copolymers with Methylmethacrylate.

Descriptive Note : Technical rept.,

Corporate Author : MASSACHUSETTS UNIV AMHERST MATERIALS RESEARCH LAB

Personal Author(s) : Babu,G N ; Narula,A ; Lu,P H ; Li,X ; Hus,S L

PDF Url : ADA132095

Report Date : Aug 1983

Pagination or Media Count : 33

Abstract : Homopolymers of 2-fluoroethyl methacrylate (FEMA), 2-chlorethyl methacrylate (CEMA) 2-bromoethyl methacrylate (BEMA), 2,2,2-trichloroethyl methacrylate (TCEMA), 2,3-dibromopropyl methacrylate (DBPMA) and copolymers with MMA over a range of compositions have been synthesized. Gamma-radiolysis yields for scission (Gs), crosslinking (Gx) and radical formation (Gr) were determined. The volatile products were analyzed by GC-MS. Probable mechanisms of radiolysis of all polymers were proposed. (Author)

Descriptors :   *Methacrylates, *Polymers, *Radiolysis, Copolymers, Halogens, Alkyl radicals, Chemical reactions, Synthesis(Chemistry), Chemical analysis, Radiation chemistry

Subject Categories : Radiation and Nuclear Chemistry
      Polymer Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE