Accession Number : ADA132207

Title :   Study of Plasma Chemistry and Plasma Processing.

Descriptive Note : Final technical rept. 15 Dec 79-15 Jun 83,


Personal Author(s) : Oskam,H J

PDF Url : ADA132207

Report Date : Jan 1983

Pagination or Media Count : 347

Abstract : The final technical report describes studies related to plasma chemistry and plasma processing funded by the Office of Naval Research during the period December 15, 1979-June 15, 1983 (Contract : N00014-80-C-0244, NR SRO-016). Two experimental systems needed for a detailed study of plasma etching and plasma deposition of thin films were constructed. A detailed study was made of the plasma processing of polymer films. Another part of the studies involved an investigation of the basic mechanisms important in the volume synthesis of materials. The three related areas of research mentioned are described in detail. The resulting scientific publications and presentations at conferences, as well as the personnel involved are given in appendices. (Author)

Descriptors :   *Plasmas(Physics), *Material forming, *Synthesis(Chemistry), Etching, Deposition, Thin films, Polymeric films, Ferrocenes, Preparation, Methodology, Laboratory procedures, Literature surveys

Subject Categories : Physical Chemistry
      Plasma Physics and Magnetohydrodynamics

Distribution Statement : APPROVED FOR PUBLIC RELEASE