Accession Number : ADA134195

Title :   Quantitative Secondary Ion Mass Spectroscopy.


PDF Url : ADA134195

Report Date : Jul 1983

Pagination or Media Count : 40

Abstract : This report describes in detail the use of the Cameca IMS-300 ion microscope for both quantitative analysis of sophisticated electronic devices and qualitative evaluation of ion implanted metals. The use of Secondary Ion Mass Spectroscopy (SIMS) in depth profiling adds a new dimension to surface analysis, enabling small concentrations of species which were previously undetectable to be determined. By being able to distinguish the differences in mass, isotopic techniques permit the elucidation of mechanisms which are responsible for the formation of wear resistant, low friction surfaces associated with titanium implantation into steels.

Descriptors :   *Semiconductor devices, *Surface analysis, *Mass spectroscopy, Electronic equipment, Metals, Ion implantation, Quantitative analysis, Qualitative analysis, Isotopes, Chemical analysis, Laboratory equipment

Subject Categories : Electrical and Electronic Equipment
      Atomic and Molecular Physics and Spectroscopy
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE