Accession Number : ADA134528
Title : Workshop on the Physics and Modeling of Submicron Structures.
Descriptive Note : Final rept. Jun 82-Jun 83,
Corporate Author : ILLINOIS UNIV AT URBANA COORDINATED SCIENCE LAB
Personal Author(s) : Hess,Karl
PDF Url : ADA134528
Report Date : Oct 1983
Pagination or Media Count : 15
Abstract : A Workshop on the Physics and Modeling of Submicron Structures has been held. The results and lectures of the Workshop are briefly described.
Descriptors : *Microelectronics, *Semiconductors, *Microstructure, Workshops, Lectures, Simulation, Lattice dynamics, Models, Reports
Subject Categories : Electrical and Electronic Equipment
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE