Accession Number : ADA134528

Title :   Workshop on the Physics and Modeling of Submicron Structures.

Descriptive Note : Final rept. Jun 82-Jun 83,

Corporate Author : ILLINOIS UNIV AT URBANA COORDINATED SCIENCE LAB

Personal Author(s) : Hess,Karl

PDF Url : ADA134528

Report Date : Oct 1983

Pagination or Media Count : 15

Abstract : A Workshop on the Physics and Modeling of Submicron Structures has been held. The results and lectures of the Workshop are briefly described.

Descriptors :   *Microelectronics, *Semiconductors, *Microstructure, Workshops, Lectures, Simulation, Lattice dynamics, Models, Reports

Subject Categories : Electrical and Electronic Equipment
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE