Accession Number : ADA136433

Title :   Theoretical Study of Laser-Stimulated Chemical Vapor Deposition Processes of Importance in Microelectronics.

Descriptive Note : Final rept. 1 Oct 82-31 Dec 83,

Corporate Author : ROCHESTER UNIV NY

Personal Author(s) : George,T F

PDF Url : ADA136433

Report Date : Dec 1983

Pagination or Media Count : 36

Abstract : Recent experiments have demonstrated that laser radiation incident on a gas surface interface can stimulate and control the process of vapor deposition onto the surface. This research project has been a theoretical analysis of the deposition and related laser-stimulated processes, with special attention given to the microscopic dynamics of energy flow associated with such processes. (Author)

Descriptors :   *Laser beams, *Vapor deposition, *Microelectronics, Research management, Reports, Surface chemistry, Fabrication, Deposition, Lasers, Gases, Surfaces, Interfaces

Subject Categories : Radiation and Nuclear Chemistry
      Electrical and Electronic Equipment
      Lasers and Masers

Distribution Statement : APPROVED FOR PUBLIC RELEASE