Accession Number : ADA137871

Title :   Development of a 3-D Microscale Topography System, Phase I.

Descriptive Note : Final technical rept.,


Personal Author(s) : Gassel,S S ; Aggarwal,B B ; Yonushonis,T M

PDF Url : ADA137871

Report Date : Dec 1983

Pagination or Media Count : 114

Abstract : This report summarizes the work done in Phase I of a program to develop a 3-D surface measurement system using a stereo pair of SEM images. Phase I consisted of a comprehensive literature survey to define the state-of-the-art in stereo-microscopy (Task 1) and a set of experiments to establish the feasibility of the proposed method (Task 2). Section II summarizes results from Phase I. Section III describes the results of the literature survey which fulfills the objectives of Task 1. Details on the computerized literature search are provided in Appendix A. The proof-of-concept experiments are discussed in Section IV and Appendix B. Finally, a description of the system to automate stereometry and construct a viable 3-D surface measurement tool is provided in Section V.

Descriptors :   *Electron microscopy, Digital systems, Scanning, Metals, Surfaces, Topography, Measurement, Stereophotogrammetry, Computer applications, Image processing, Three dimensional

Subject Categories : Metallurgy and Metallography

Distribution Statement : APPROVED FOR PUBLIC RELEASE