Accession Number : ADA141832
Title : Theory of Laser-Induced Surface Chemistry with Applications to Microelectronics and Heterogeneous Catalysis.
Descriptive Note : Technical rept.,
Corporate Author : ROCHESTER UNIV NY DEPT OF CHEMISTRY
Personal Author(s) : Lin,J T ; Murphy,W C ; George,T F
PDF Url : ADA141832
Report Date : May 1984
Pagination or Media Count : 58
Abstract : Theory and experiments are reviewed for how laser radiation can stimulate various component mechanisms which contribute to the complex chemistry involved in heterogeneous catalysis. These mechanisms include the processes of desorption, migration and chemical reactions at a gas-solid interface. Application of laser-induced surface chemistry to microelectronics in circuit deposition, lithography, annealing and final testing of the circuit are discussed. In addition to the review, some new theory is presented.
Descriptors : *Surface chemistry, *Chemical reactions, *Lasers, Catalysis, Photolysis, Microelectronics, Heterogeneity, Desorption, Annealing, Test methods, Lithography, Gases, Interfaces, Solids
Subject Categories : Physical Chemistry
Lasers and Masers
Distribution Statement : APPROVED FOR PUBLIC RELEASE