Accession Number : ADA180995
Title : Theoretical Investigation of Homogeneous and Heterogeneous Reactions in the Chemical Vapor Deposition of Silicon from Silane.
Descriptive Note : Final rept. 15 Jan 85-30 Sep 86,
Corporate Author : OKLAHOMA STATE UNIV STILLWATER DEPT OF CHEMISTRY
Personal Author(s) : Thompson,Donald L.
Report Date : 15 JAN 1987
Pagination or Media Count : 10
Abstract : This report summarizes the computer equipment purchased on grant AFOSR-85-0115. The Scientific programs being supported by this equipment are described and finally a listing of all papers published since the acquisition of the computer is given. Keywords: Computers; Theoretical chemistry; Silicon.
Descriptors : *SILICON, *SILANES, ACQUISITION, COMPUTERS, HETEROGENEITY, THEORY, CHEMICAL REACTIONS, VAPOR DEPOSITION, CHEMISTRY
Subject Categories : Organic Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE