Accession Number : ADA181197
Title : Crystal Growth and Mechanical Properties of Semiconductor Alloys.
Descriptive Note : Annual rept. 15 Apr 86-14 Apr 87,
Corporate Author : STANFORD UNIV CA DEPT OF MATERIALS SCIENCE AND ENGINEERING
Personal Author(s) : Stevenson,D A
PDF Url : ADA181197
Report Date : 21 May 1987
Pagination or Media Count : 26
Abstract : The mechanical properties of semiconductor materials are related to changes in electronic and optical properties that may occur during the processing of materials into wafers and wafers into devices. Recent theoretical models related hardness in ternary semiconductor alloys to fundamental atomic properties, but few data are available. The report details the progress made in exploring methods for mechanical property studies of these alloys. Three approaches were used: hardness measurements in thick films (10-100 micrometer) using conventional microhardness, techniques; hardness measurements in thin films (less than 1 micrometer) using a nanoindenter; and the growth of bulk samples for use in conventional mechanical tests.
Descriptors : *ALLOYS, *SEMICONDUCTORS, MICROHARDNESS, ELECTRONICS, OPTICAL PROPERTIES, HARDNESS, MEASUREMENT, MECHANICAL ENGINEERING, MECHANICAL PROPERTIES, SEMICONDUCTORS, TERNARY COMPOUNDS, THICK FILMS, ATOMIC PROPERTIES, CRYSTAL GROWTH, SAMPLING, MATERIALS, PROCESSING, SEMICONDUCTORS, MODELS, THEORY, THIN FILMS
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE