Accession Number : ADA181445
Title : Thin-Film Optoelectronic Circuits Research Program.
Descriptive Note : Final technical rept. 1 Feb 85-31 Jan 87,
Corporate Author : HONEYWELL INC BLOOMINGTON MN PHYSICAL SCIENCES CENTER
Personal Author(s) : Arnold,Steven M
PDF Url : ADA181445
Report Date : Apr 1987
Pagination or Media Count : 49
Abstract : The program objective has been to identify and investigate IC-compatible fabrication processes for thin-film optoelectronic circuits on GaAs. Single-mode channel waveguides of SiO2-ZnO-SiO2, SiO2-Al2O3-TaO2-SiO have been deposited on GaAs by ion-beam sputtering. Straight guides, curves, tapers, Y-branches, crossovers, and directional couplers have all been demonstrated. Novel concepts have been developed for integrated GaAs Schottky photodiodes and self-aligning fiber-to-waveguide couplers. An IC-compatible baseline fabrication process has been established and a photomask set has been completed for an optoelectronic circuit demonstration, including Mach-Zehnder interferometric modulators, delta-beta electro-optic switches, and integrated GaAs photodetectors. Keywords include: Integrated Optics, Gallium Arsenide (GaAs), Zinc Oxide (ZnO), Electro-Optic Devices, and Thin-Film Waveguides.
Descriptors : *ELECTROOPTICS, *OPTICAL WAVEGUIDES, *OPTICAL CIRCUITS, COUPLERS, DIRECTIONAL, GALLIUM ARSENIDES, INTEGRATED SYSTEMS, SCHOTTKY BARRIER DEVICES, ION BEAMS, SPUTTERING, CIRCUITS, DEMONSTRATIONS, ELECTROOPTICS, THIN FILMS, PHOTODETECTORS, OPTICS, INTERFEROMETRY, MODULATORS, PHOTOMASKING, WAVEGUIDES, ZINC OXIDES, FABRICATION, ALUMINUM OXIDES
Subject Categories : Electrooptical and Optoelectronic Devices
Distribution Statement : APPROVED FOR PUBLIC RELEASE