Accession Number : ADA182357

Title :   Template-Set Approach to VLSI (Very Large Scale Integrated) Pattern Inspection,

Corporate Author : STANFORD UNIV CA CENTER FOR INTEGRATED SYSTEMS

Personal Author(s) : Chae,Soo-Ik ; Walker,James T ; Dameron,David H ; Fu,Chong-Cheng ; Meindl,James D

PDF Url : ADA182357

Report Date : Jan 1984

Pagination or Media Count : 9

Abstract : A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.

Descriptors :   *DEFECTS(MATERIALS), *CIRCUITS, *INSPECTION, *TEMPLATES, ALGORITHMS, AUTOMATIC, DETECTION, ERROR DETECTION CODES, ERRORS, PATTERNS, SIZES(DIMENSIONS)

Subject Categories : Electrical and Electronic Equipment
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE