Accession Number : ADA182395
Title : Multilayer Capacitor Dielectrics Produced from Metallo-Organic Precursors.
Descriptive Note : Annual rept. 1 Apr 86-31 Mar 87,
Corporate Author : PURDUE UNIV LAFAYETTE IN
Personal Author(s) : Vest, R W ; Vest, G M ; Shaikh, A S ; Liedl, G L
PDF Url : ADA182395
Report Date : 15 May 1987
Pagination or Media Count : 110
Abstract : The metallo-organic decomposition (MOD) process is an alternate to expensive methods of preparing thin films. The process involves: dissolving the metallo-organic compounds in an appropriate solvent; mixing the solutions to achieve desired stoichiometry; after adjusting the rheology, depositing these formulations on an appropriate substrate to make a film and then firing these wet films to obtain the desired conductor, resistor or dielectric thin/thick films. Since the mixing of the starting materials is on the molecular level, the inorganic species exist as atoms or molecules in intimate contact immediately after decomposition. This leads to much more rapid formation of compounds and sintering of films, which translates to lower temperature processing of equilibrium phases and more dense films. The metallo-organic compounds used in the present study, a low viscosity solution of metallo-organic compounds was deposited on a spinning substrate to obtain wet films. The object of this project is to prepare multilayer dielectric films using the MOD technique. Studies of the formation of dielectric and electrode films using the MOD technique are focus of this report. Keywords: Capacitors.
Descriptors : *THIN FILMS, *ORGANOMETALLIC COMPOUNDS, ATOMS, CAPACITORS, DECOMPOSITION, DIELECTRIC FILMS, DIELECTRICS, ELECTRODES, EQUILIBRIUM(GENERAL), HIGH DENSITY, INORGANIC MATERIALS, LAYERS, LOW TEMPERATURE, MOLECULAR STATES, MOLECULES, PHASE, PRECURSORS, PROCESSING, RESISTORS, RHEOLOGY, SINTERING, SOLUTIONS(GENERAL), SPINNING(MOTION), STOICHIOMETRY, SUBSTRATES, FILMS
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE