Accession Number : ADA182509
Title : Scanning Tunneling Microscopy and Lithography of Solid Surfaces Covered with Non-Polar Liquids.
Descriptive Note : Technical rept. no. 25, 1 Feb 85-31 Jan 87,
Corporate Author : CALIFORNIA UNIV SANTA BARBARA DEPT OF PHYSICS
Personal Author(s) : Schneir,J ; Hansma,P K
PDF Url : ADA182509
Report Date : 19 Jul 1987
Pagination or Media Count : 13
Abstract : Atomic resolution tunneling microscopy can be done under nonpolar liquids. Two possible areas of application are explored: lithography and imaging air sensitive materials. The lithography was demonstrated by writing a 20 A x 40 A wide and 20 A deep hole onto a gold surface. The imaging of air sensitive materials was demonstrated by imaging Gallium Arsenide.
Descriptors : *TUNNELING(ELECTRONICS), *ELECTRON MICROSCOPY, *PHOTOLITHOGRAPHY, AIR, MATERIALS, SENSITIVITY, GOLD, SURFACES, GALLIUM ARSENIDES, IMAGES, SOLID BODIES, ATOMIC PROPERTIES, MICROSCOPY, RESOLUTION, TUNNELING, LIQUIDS, POLARIZATION, ELECTRONIC SCANNERS, HIGH RESOLUTION
Subject Categories : Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE