Accession Number : ADA184022
Title : GaAs Varactor Diode MMIC (Monolithic Microwave Integrated Circuit) Fabrication Technology.
Descriptive Note : Memorandum rept.,
Corporate Author : ROYAL SIGNALS AND RADAR ESTABLISHMENT MALVERN (ENGLAND)
Personal Author(s) : Hughes,B T ; Parker,J T ; Woodward,J
PDF Url : ADA184022
Report Date : Mar 1987
Pagination or Media Count : 62
Abstract : The design criteria and techniques developed to fabricate a monolithic low series resistance N on N+ GaAs varactor diode and the associated microwave circuit are described. Details of a high resolution polyimide patterning process developed for this device are included as is a description of the experimental work carried out to establish the practical design rules for the polyimide dielectric on chip capacitors. A description of the seven level mask set and associated processing are included and an assessment of the yield obtained on several wafers is discussed. The processing technology described in this memo has been successfully transferred to UK industry.
Descriptors : *MICROWAVE EQUIPMENT, *GALLIUM ARSENIDES, *VARACTOR DIODES, *CHIPS(ELECTRONICS), *INTEGRATED CIRCUITS, *MONOLITHIC STRUCTURES(ELECTRONICS), YIELD, FABRICATION, GREAT BRITAIN, INDUSTRIES, CIRCUITS, PROCESSING, CAPACITORS, HIGH RESOLUTION, POLYIMIDE RESINS, MASKS
Subject Categories : Electrical and Electronic Equipment
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE