Accession Number : ADA185395

Title :   The Production of Ultrasmall and Superfine Holographic Diffraction Gratings Using Synchrotron Radiation and Lithographic Techniques.

Descriptive Note : Annual rept. (Final) 1 Sep 85-31 Dec 86,

Corporate Author : OREGON UNIV EUGENE INST OF THEORETICAL SCIENCE

Personal Author(s) : Csonka, Paul L

PDF Url : ADA185395

Report Date : Feb 1987

Pagination or Media Count : 21

Abstract : The research effort was directed toward the production of superfine X-ray gratings by holographic means, i.e. generating an interference pattern by X-rays emitted in the form of synchrotron radiation from a high energy electron storage ring, recording the pattern on a resist, such as PMMA, and subsequently transferring it onto metal.

Descriptors :   *GRATINGS(SPECTRA), *PHOTOLITHOGRAPHY, *HOLOGRAPHY, X RAY DIFFRACTION, HIGH RESOLUTION, INTERVALS, SHORT RANGE(DISTANCE), FABRICATION, POLYMETHYL METHACRYLATE

Subject Categories : Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE