Accession Number : ADA185815

Title :   Materials Research Society Symposia Proceedings. Volume 76. Science and Technology of Microfabrication Held in Boston, Massachusetts on 4-5 December 1986,

Corporate Author : MATERIALS RESEARCH SOCIETY PITTSBURGH PA

Personal Author(s) : Howard, R. E. ; Hu, E. L. ; Namba, S. ; Pang, S.

Report Date : 1987

Pagination or Media Count : 387

Abstract : These proceedings are a referred account of the Symposium on the Science and technology of Microfabrication, that was held as part of the 1986 Fall Meeting of the Materials microfabrication techniques as well as the many applications which make use of those techniques used to fabricate them. Microfabrication is thus far from being merely means to an end. As the limits of achieve resolution are approached and as the perturbations affected by the processes themselves become of greater consequence to proper device operation, the exploration and study of the proper techniques become ends in themselves. The science and technology of microfabrication are inherently cross-disciplinary areas, calling on various aspects of chemistry, physics and materials science. Their applications are wide-ranging, being consequential to a broad spectrum of electronic and mechanical devices and sensors. Further, innovative, high resolution microfabrication techniques make possible access to the study physical phenomena at small dimensions that may in turn lead to new device concepts. The program of this Symposium was constructed to present the variety of techniques and applications of microfabrication. There was discussion of issues, processes and materials for manufacturable VLSI circuits, of processes in transition from research tool to manufacturing application and of very high resolution techniques utilized for the study of physics at nanometer dimensions. The Symposium brought together participants from industry and the academic setting, with a substantial representation of international participants.

Descriptors :   *FABRICATION, *MICROMINIATURIZATION, *MICROELECTRONICS, *FIELD EFFECT TRANSISTORS, *ELECTRIC WIRE, *CRYSTALS, *SILICIDES, *PLATINUM, *ION IMPLANTATION, *LITHOGRAPHY, *INTEGRATED CIRCUITS, *NITRIDES, *ETCHING, *INDIUM, *LASER BEAMS, *SPUTTERING, *ALUMINUM ALLOYS, *SILICON, *ION BEAMS, *ELECTRON BEAMS, *SEMICONDUCTORS, DETECTORS, HIGH RESOLUTION, MANUFACTURING, MECHANICAL COMPONENTS, PHYSICAL PROPERTIES, PHYSICS, SYMPOSIA.

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE