Accession Number : ADA187645
Title : Application of Nondestructive Testing Techniques to Materials Testing.
Descriptive Note : Annual rept. 1 Jan-31 Dec 86,
Corporate Author : STANFORD UNIV CA EDWARD L GINZTON LAB OF PHYSICS
Personal Author(s) : Kino, G S
PDF Url : ADA187645
Report Date : Nov 1987
Pagination or Media Count : 10
Abstract : The aim of this work during the last year has been to carry out research on new types of optical microscopes which gives better resolution in both the transverse and range directions than standard high-quality optical microscopes. The reason for carrying out such studies is that there is a need for measurements of semiconductor profiles with submicron resolution. The scanning electro microscope has excellent transverse resolution, but poor range resolution; it must be used in a vacuum, and it can damage sensitive semiconductor materials. We have been working with new scanning optical microscope concepts which provide excellent range resolution, of the order of 10nm, less, and transverse resolutions of the order of 200nm, and with computer processing as good as 130nm.
Descriptors : *MICROSCOPES, *SEMICONDUCTORS, *NONDESTRUCTIVE TESTING, COMPUTERS, PROCESSING, MATERIALS, TEST AND EVALUATION, OPTICAL PROPERTIES, PROFILES, ORIENTATION(DIRECTION), TRANSVERSE, DAMAGE, MATERIALS, SEMICONDUCTORS, SENSITIVITY, TEST METHODS, RESOLUTION, TRANSVERSE, HIGH RESOLUTION
Subject Categories : Optics
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE